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Tool Order: Wuhan Xinxin Semiconductor selects VECTOR Express from Novellus
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Wuhan Xinxin Semiconductor Manufacturing Corporation has purchased
Novellus Systems’ VECTOR Express CVD platform for its 300mm fab that
will be managed and operated by SMIC. The shipment also meets a new
milestone for Novellus in its being the company’s 100th tool delivered
to China.
“Wuhan Xinxin Semiconductor is the first 300 mm fab in central China,”
said John Liu, Vice President of the Wuhan project at SMIC. “Continued
improvements in productivity are critical in delivering advanced
technologies. Novellus’ products, such as the production-proven VECTOR
Express, are instrumental to achieving our goal.”
“Fabs
in China that are ramping up their 300mm facilities are looking for
high-productivity tools that will give them the maximum return on their
investment,” said Tom Caulfield, Executive Vice President of Sales,
Marketing and Customer Service, Novellus Systems.