Novellus Systems has reached the 100th shipped 300mm tool to Southeast Asia with the successful qualification of a ‘VECTOR Express’ plasma-enhanced chemical vapor deposition (PECVD) system at TECH Semiconductor’s 300mm DRAM fab in Singapore, the company said. 

"The unparalleled productivity demonstrated by VECTOR Express has helped TECH Semiconductor continuously drive down cost of ownership in the challenging DRAM marketplace," said Andrew Goh, President of Novellus' Southeast Asia operations. "TECH is pleased with Novellus' responsiveness and our commitment to improve productivity for a variety of applications, including AHM, TEOS, SiN and SiON films."