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Toshiba uses Brion’s Tachyon OPC+ for 45nm logic devices |
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Feb 21, 2008 at 02:06 PM |
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 Toshiba Corporation is using Brion’s Tachyon OPC+ optical proximity correction (OPC) computational lithography technology for its 45nm devices, Brion said. Toshiba is a past user of Brion’s technology at the 65nm node.
“We are pleased to continue to support Toshiba’s production of low k1 processes,” said Noriaki Kikuchi, President, Japan operations, Brion Technologies KK. “Toshiba’s decision to rely on Tachyon OPC+ for 45nm production demonstrates once again our leadership in computational lithography for advanced technology nodes.”
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Lithography 
