Axcelis Technologies, Inc. commented during its third quarter financial analyst conference call that the company has received the first order for its newly launched high dose implanter, based on the Optima platform. The multiple tool order should be shipped in the 4Q05, though the company declined to provide further information.
The Optima HD will be used for 65nm processing, which the company is targeting to gain back market share in the high dose, single wafer market segment. The company reiterated to financial analyst that it did not feel being late to market with the tool will adversely impact its potential sales at the 65nm node. The company highlighted that volume production at the 65nm node is not expected until the end of 2006 at the earliest for many logic chip manufacturers while memory manufacturers were still ramping at the 90nm node.