|
Tool Order: Inotera places follow-on order for mass metrology tool with Metryx |
|
|
|
Jan 24, 2008 at 02:15 PM |
|
 Inotera Memories has placed a follow-on order with Metryx Limited for its Mentor DF3 mass metrology tool that will initially be used to monitor deep-trench etch processes at one of Inotera’s 300mm DRAM fabs in Taiwan. The Mentor DF3 offers atomic layer measurement accuracy for high volume 300mm manufacturing environments.
“The Mentor’s ability to effectively monitor our processes and keep process tools from drifting were the key to our decision to place additional orders for Metryx’s technology,” stated Joey Hsu, Deputy Director of Advanced Engineering Service at Inotera. “The fact that the DF3 can be used in-line and on product wafers makes it particularly effective in a high-volume manufacturing environment.”
“Winning follow-on orders is another significant step forward for both company and technology,” said Dr. Adrian Kiermasz, President and CEO of Metryx. “Clearly, leading-edge manufacturers are seeing the benefit of the technology and are finding it increasingly indispensable to their manufacturing productivity.”
|
News 
