Joe Bartolomeo & J. D. Detrempe, Rockwell Automation, Milwaukee, WI, USA

ABSTRACT

Implementing Semiconductor Equipment and Materials International (SEMI) standards for semiconductor capital equipment has traditionally been a timeconsuming and tedious process, based on proprietary software programs, and requiring custom software development. Now, off-the-shelf software products based on open systems technologies like Microsoft ActiveX controls and Visual Basic for Applications, allow developers and OEMs to create SEMI-compliant systems in weeks, rather than months, with no custom coding. Developers and OEMs can quickly deploy systems by setting up only the basic GEM requirements, like event notification and alarm messages, and can add additional capabilities when needed.