Reiner Missale, Qimonda AG, Germany
 
ABSTRACT 

300mm technology has forced the semiconductor industry to take a broader perspective on the classical understanding of production and Shop-Floor Control. As a consequence, the focus shifted from the perspective of Transport Automation and Manufacturing Execution Systems to the integrated Factory, viewing all involved elements for semiconductor production. In pre-300mm, the process-engineering domain saw limited overlap to production logistic and transport. Today the linkage and integration of process control and shop-floor control and production logistic is acknowledged as a key factor for operational excellence. These are the Enabling Technologies for the high-end “Manufacturing Operations Management”.