Jan-Willem Gemmink, Philips Semiconductors, Nijmegen, The Netherlands; Peter Zandbergen, Philips Semiconductors, Kapeldreef, Leuven, Belgium

ABSTRACT

As the ITRS roadmap confirms its accelerated pace of two years per technology node, the status and maturity of the lithography solutions upon introduction of the nodes is influenced. Though on paper the technological solutions on individual domains as mask, resist and tools are ready just in time, integration into full process flowcharts, however, is not thoroughly addressed. In this paper we will address the impact of this shrinking time window on the focus areas going from basic R&D of process step concepts
down to release of the intended solutions in process technology at product sampling. In the domain of SOC manufacturing this also implies modifications in process solutions that have to come after initial introduction of a technology. In addition we indicate how we see that the global programs as executed in various pre-competitive consortia by themselves not necessarily prepare for a smooth integration of technologies such as 157 nm or EUV lithography into manufacturing situations. We give some examples of such less
considered challenges that have to be addressed by device makers to assure robust and proven manufacturing boundaries for the use of these challenging lithography technologies.

14th Edition: Consequences of ITRS Roadmap Acceleration for Device Makers on Advanced Lithography Integrated into Development and Release of Technology