|
New NF3 plant set for China |
|
|
|
Sep 08, 2005 at 06:22 PM |
|
DuPont Fluoroproducts plans to construct a new manufacturing
facility to produce nitrogen trifluoride (NF3), used for chamber cleaning and
etch gas processes.
The plant will be located in Changshu, Jiangsu Province in
China, where DuPont Fluoroproducts has established a new multi-product complex,
as part of a larger DuPont strategy to double its investment in this region
from the existing US$600 million to US$1.2 billion by 2010, according to the
company. The new plant will have an initial capacity of 450 tonnes per year,
staring in 2007.
The company plans to install its patented purification
technology to deliver high-quality grades of DuPont™ Zyron® NF3 electronic
gases to the global market.
|
News 
