Nikon gains new customers for its immersion lithography tools - Fabtech - The online information source for semiconductor professionals

Core Sections

Wafer Processing

Lithography

Fab management

This Site
Engineering Web

Username: Password: Password Reminder No account? Register

Home

News

Lithography

Nikon gains new customers for its immersion lithography tools

Nov 30, 2007 at 04:21 PM

Nikon Corporation has said that its volume production immersion tool - the NSR-S610C - has gained new customer wins in 2007 after the successful adoption and ramp of 56nm NAND flash, believed to be with long-standing customer Toshiba Corp.

“After our immersion success for 56 nm NAND applications, customer interest has been extremely high,” said Kazuo Ushida, President of the Nikon Precision Equipment Company. “As a result, we were able to capitalize on opportunities with existing customers, as well as gain several new customers in 2007. The proliferation of the NSR-S610C is further evidence of our leadership in immersion technology.”

Nikon also said that it had now shipped the NSR-S610C ArF tool to all of the five major regions of the world where leading-edge devices are manufactured. The company has yet to disclose publicly the number of immersion tools it had sold.

Readers' comments

Comment by niekgo on 2007-12-01 11:25:40
From Solid State Magazine, December: The wonders of water:

Nikon reported that 10 NSR-610C systems have been shipped

Bookmark with:
Delicious	Digg	reddit	Facebook	StumbleUpon

Visit Fabtech Jobs website

Subscribe to Fabtech weekly newsletter

Toshiba using Nikon’s S610C immersion tool for 43nm in Fab 3 in 2Q08 (19/10/2007)

Nikon ships 45nm immersion litho system (28/02/2007)

Nikon to receive first XLR 500i light source from Cymer (27/02/2007)

Tool Order: Powerchip orders production immersion tool from Nikon (14/12/2006)

Tool Orders: Nikon ships production immersion tool to Toshiba (16/02/2006)

Related jobs

Systems Engineer (Camarillo, 25/06/2008)

Manager of Projects (Camarillo, 25/06/2008)

Applications Engineer (Austin, 10/06/2008)

Ingenieur Conception analogique/mixte Power Management (Toulouse, 19/02/2008)

Application Developer Engineering Manager (Silicon Valley , 14/09/2007)