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Nikon gains new customers for its immersion lithography tools

Nov 30, 2007 at 04:21 PM

Nikon Corporation has said that its volume production immersion tool - the NSR-S610C - has gained new customer wins in 2007 after the successful adoption and ramp of 56nm NAND flash, believed to be with long-standing customer Toshiba Corp.

“After our immersion success for 56 nm NAND applications, customer interest has been extremely high,” said Kazuo Ushida, President of the Nikon Precision Equipment Company. “As a result, we were able to capitalize on opportunities with existing customers, as well as gain several new customers in 2007. The proliferation of the NSR-S610C is further evidence of our leadership in immersion technology.”

Nikon also said that it had now shipped the NSR-S610C ArF tool to all of the five major regions of the world where leading-edge devices are manufactured. The company has yet to disclose publicly the number of immersion tools it had sold.

Readers' comments

Comment by niekgo on 2007-12-01 11:25:40
From Solid State Magazine, December: The wonders of water:

Nikon reported that 10 NSR-610C systems have been shipped

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