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Tokyo Electron teams with Integrated Materials on furnace consumables |
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Nov 30, 2007 at 02:37 PM |
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 Tokyo Electron has entered into a marketing alliance with Integrated Materials, Inc. (IMI) in relation to IMI’s pure poly silicon furnace consumable products. TEL also said that further collaboration was being discussed.
Under the new agreement, TEL designates IMI as a strategic supplier making IMI products as its preferred furnace consumables. However, TEL has also been granted exclusive rights to use IMI’s ‘SiFusion’ 100 percent pure poly silicon furnace consumables for LPCVD Poly applications.
“TEL is always interested in adopting a new technology that will benefit customers,” said Hiroshi Takenaka, Corporate Director of TEL and Senior Vice President and General Manager of the Thermal Processing System Business Unit. “We expect this alliance will provide better overall furnace system performance to customers at lower overall cost of ownership.”
“Together with TEL’s most advanced furnace systems, we expect to provide high purity, low maintenance, and improved cost of ownership furnace solutions to IC manufacturers worldwide,” noted Daniel Rubin, President and CEO of IMI.
Both companies claim that IMI’s SiFusion products allow TEL furnace systems to accumulate 5 to 20 times more Poly LPCVD film deposition before preventative maintenance schedules, providing Total Cost of Ownership reductions in cleaning costs and PM cycles.
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