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Tool Order: Mattson makes RTP deals in Japan, Korea, Europe, Singapore and Taiwan |
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Nov 28, 2007 at 04:36 PM |
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 Major wafer manufacturers in Japan, Korea, Europe, Singapore and Taiwan have recently placed multiple RTP system orders with Mattson Technology for both 200mm and 300mm fabs. The tool orders include Matton’s ‘Helios’ 3000 and 2900 RTP systems that will be used for bulk silicon and silicon-on-insulator (SOI) wafer production.
“The world’s leading wafer manufacturers continue to select Mattson based on our RTP systems’ ability to meet their stringent production requirements for the volume manufacturing of silicon and SOI wafers,” said Andreas B. Toennis, Senior Vice President and General Manager of Mattson Technology’s Thermal Products Group.
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