Comment by GUEST on 2007-11-13 17:35:18 Many people are indeed glossed over about high-k. There is still SiO2 interfacing the silicon; it has been thinned to less than a nanometer. On top of that there is 3 nm of the HfSiOx/HfO2. I wouldn't be surprised if nitrogen were incorporated as well. The SiO2 interfacial layer means EOT is still not scaling that fast. |
Comment by GUEST on 2007-11-13 10:53:05 Ohhh the skeptic (http://www.fabtech.org/content/view/2420/) still having a problem accepting Intel has made a massive breakthrough. |