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Tool Order: Rudolph’s new S3000A metrology tool gains multiple customers |
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Nov 07, 2007 at 05:14 PM |
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 Rudolph Technologies has said that its recently launched S3000A Transparent Thin Film Metrology System has seen early market acceptance with the sale of multiple tools to a leading memory foundry in Taiwan and a fab in Europe. The memory foundry will receive multiple tools in each of the next two quarters and the European fab order will be shipped this quarter.
“The low cost-of-ownership of the S3000A Metrology System extends our focused beam ellipsometry, long recognized as an optimal solution for demanding applications like diffusion, to a broader range of processes throughout the fab, including etch, CMP and back-end thin films,” said Paul Ter Beek, Rudolph’s Manager for thin film and OCD metrology. “The fundamental stability of laser-powered metrology enables accurate, consistent measurements among metrology tools, making it a production-worthy solution for fab-wide deployment. The strong response of our customers to the S3000A system is further confirmation of the CoO value our solutions provide.”
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