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Increasing Productivity in Existing Fabs by Simplified Tool Interconnection
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MITCHELL WEISS, PRI Automation, Billerica, MA, USA
ABSTRACT
Semiconductor manufacturing productivity continues to advance at an incredible pace. At the same time, the complexity of operating a fab also continues to grow at an alarming rate. Losing control of this complexity can stall the improvements in productivity, while harnessing and managing the opportunity can increase the rate of productivity improvement. In this article we will explore using mainstream technologies to simplify equipment connectivity and allow for improved fab performance based on increased information accessibility.
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