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Industry needs more alliances like Aviza, BOC Edwards ALD partnership |
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Oct 31, 2006 at 03:30 PM |
Although the number of consortia, alliances, joint development agreements, and R&D partnerships has never been higher among equipment, materials, subsystems, and components manufacturers, as well as the chipmakers themselves, there are too few examples of capital equipment companies and materials houses getting in bed together.
That's why the JDA bringing together toolmaker Aviza and chemical and subsystems producer BOC Edwards to work on advanced atomic layer deposition is welcome news.
The two companies say the development deal "will utilize BOC Edwards' expertise in chemical precursor formulation and Aviza's advanced ALD hardware technology to optimize deposition processes for high-k materials and metals." BOC believes its Flex-ALD line of precursors can enable "the deposition of very pure thin films and extend the range of ALD compatible compounds to include heavier elements not previously available. These novel precursors can reduce the cost and improve the efficiency of ALD processes by increasing precursor utilization, providing stable and consistent delivery without decomposition or condensation, and increasing growth rates for higher throughput."
The partners say they will evaluate the films on Aviza's single-wafer and batch ALD toolsets as part of the JDA before fully releasing the chemistries into the marketplace.
The industry needs to foster more of these kind of cooperative alliances between the molecule guys and the process tool--engineering cadre.
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