|
Run-to-run plug-in modules for complex manufacturing environments |
|
|
|
Aug 05, 2005 at 06:38 PM |
 Product Briefing Outline: Brooks Software, a division of Brooks
Automation, Inc., and a leading provider of real-time enterprise
applications for collaborative, complex manufacturing environments,
today announced the availability of a Run-to-run (R2R) plug-in
application for the Brooks Advanced Process Control (APC) Platform.
Problem: Currently, most equipment engineering applications are
essentially islands of automation. With the Brooks APC Platform, users
can take advantage of a universal integration approach, allowing faster
deployment and the added value of interoperable runto-run control,
fault detection, yield management, and dispatching systems. These
capabilities are outlined as key enablers for semiconductor
manufacturers to meet the International Technology Roadmap for
Semiconductors.
Solution: The new R2R application module provides a development
environment that lowers the cost of ownership by reducing model
management activities through a unified modeling structure and advanced
technology particularly suited for high mix product environments. The
R2R module includes a graphical development environment enabling
process engineers to quickly develop their own process controls without
complex software code.
Applications: Pre-configured controllers for common process areas such as lithography, etch, CMP, and diffusion.
Platform: The Brooks R2R module is built on the Brooks APC
Platform, the first commercially available framework to comply with the
new SEMI E133 process control system (PCS) standard. It provides a high
level of interoperability to ensure that manufacturers can deploy
Brooks' best-of-breed application modules, as well as third-party
control applications, or customer developed proprietary applications.
The APC Platform provides a user interface and execution engine that
allows users to configure APC strategies graphically without relying on
costly software code or scripts.
Availability: April 2005 onwards.
|
Product Briefings 
