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New Product: VisionPad 5000 from Rohm and Haas reduces CMP scratch and chatter marks
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Product Briefing Outline: Rohm and Haas Electronic
Materials’ CMPTechnologies division has introduced the ‘VisionPad’ 5000
CMP pad, specifically designed for defectivity reduction in shallow
trench isolation (STI) and interlayer dielectric (ILD) applications.
The new pad targets volume manufacturing of memory and logic chips at
65nm and below.
Problem: The mechanics of STI scratch defects during
CMP are directly related to the interaction of materials at the
interface of the pad with the wafer surface. To address this issue,
Rohm and Haas developed the VisionPad 5000 with an optimized polymer
and pore structure designed to improve the robustness of STI CMP
processes. In addition, the VisionPad 5000 is claimed to achieve a 50
percent reduction in CMP-induced scratch and chatter marks over current
materials. The pad is designed to produce improved results in overall
planarization and when coupled with ceria-based polishing slurries, the
removal rate is also enhanced.
Solution: The
VisionPad 5000 features an advanced polymer specifically designed by
CMP Technologies to lower defectivity on all types of commercial
slurries. To achieve lower defectivity with good planarity, the
VisionPad 5000 uses an energy absorbent polymer in a unique
formulation. It has demonstrated performance factors that are equal to
the industry standard IC1000 pad – including removal rate, dishing,
erosion, process window and planarity - while reducing defectivity by
at least 50 percent. Other features include a long pad lifetime and
multiple grooving, sub-pad and adhesive configurations. Polishing and
conditioning recommendations are also offered by Rohm and Haas. The
VisionPad 5000 pads offer predictable pad-to-pad performance and stable
operation throughout the process, according to the company.
Applications: Shallow trench isolation and interlayer dielectric polishing steps.
Platform:
All VisionPad products are manufactured using stringent SPC/SQC
methods. VisionPad products will be manufactured and supported in Rohm
and Haas’s new facility in Taiwan as well as the Company’s existing
manufacturing site in the United States.
Availability: January 2008 onwards.