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Magentic levitation rotary actuator with zero-contamination vacuum motion |
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Oct 08, 2004 at 05:00 PM |
 Product Briefing Outline: Omni-Lev is Rigaku's new rotary
actuator system for use in contamination-sensitive applications. Unlike
traditional ball bearing based actuators, Omni- Lev is supported
entirely by magnetic fields, eliminating contact between moving parts
that can generate damaging particles. This invention (patent pending)
resulted from a two-year development at Rigaku's vacuum business unit,
Rigaku Mechatronics.
Problem: Many industrial processes, such as the manufacture of
semiconductor computer chips, are exceptionally sensitive to
particulate contamination. Trace levels of such contaminants can
dramatically reduce wafer yields.
Solution: Unlike traditional ball bearing based actuators,
Omni-Lev is supported entirely by magnetic fields, eliminating contact
between moving parts that can generate damaging particles. Omni-Lev's
noncontact mechanism not only eliminates particulate generation but
also eliminates friction-resulting in very accurate positioning,
ultra-low shaft run-out, very long life and the virtual elimination of
maintenance. Another important feature is the all-metal construction,
allowing the actuator to be used in UHV-vacuum level environments as
well as in corrosive gas or liquid settings, as commonly encountered in
semiconductor manufacturing processes.
Applications: UHV-vacuum level environments as well as in corrosive gas or liquid settings.
Platform: High temperature tolerance. Ultra-low vibration.
Ultra-high-speed capable. Zero maintenance. No oils or fluids used. No
bearings in vacuum.
Availability: June 2004 onwards.
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Product Briefings 
