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Pressure transducer for stabilty and realiability in pressure measurments |
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Oct 08, 2004 at 06:00 PM |
 Product Briefing Outline: Mykrolis Corporation has launched
SolidSense II, which the company claims, represents the most recent
advancements in pressure transducer technology. Utilizing leading edge,
glass-fused strain gauge technology and digital signal processing,
SolidSense II raises the standard for high performance in gas delivery
systems and tools used for pressure measurement in semiconductor
processing.
Problem: SolidSense II uses superior stable glass bonded sensing
elements to help eliminate zero instability commonly known as ‘drift.'
Its advanced digital architecture provides enhanced correction and
compensation not achievable with ordinary analog signal processing.
Independent of changes in the operational environment SolidSense II's
automated software-driven calibration and compensation processes are
more capable than passive compensation over a wide spectrum of
temperature points.
Solution: The ultra stable, micro-machined silicon strain gauges
are matched and fused, at high temperature, to the metal diaphragm,
which is guarded by stress relieving features. The "drift" (lack of
zero stability) commonly associated with competitive products is
essentially eliminated. Consequently, the requirements for zero
adjustment and frequent readjustment to compensate for "drift" are
reduced by an order of magnitude.
Applications: Gas delivery systems and tools used for
semiconductor processing, including: Specialty gas cabinets; Valve
Manifold Boxes (VMBs); Gas panels and bulk gas distribution systems.
Platform: Ultra stable glass bonded sensing elements. 4 to 20
mA, 0.05 to 5.05 V, and 0.00 to 10.00 V outputs available.
Electropolished wetted material for UHP applications.
Availability: July 2004 onwards.
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Product Briefings 
