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UHP gas pressure regulator reduces system footprint |
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Oct 08, 2004 at 09:00 PM |
 Product Briefing Outline: The new ultrahigh-purity,
manually adjustable Swagelok HFE series gas pressure regulator supports
flow rates up to 160 std L/min and maximum inlet pressures up to 150
psig (10.3 bar). It is designed for 1 1/8 in. C-ring integrated gas
systems.
Problem:Regulators will often experience a drop in outlet pressure
as gas flow increases through the regulator (droop). This may
require manual adjustments. Flow may also be an issue. Footprint
(or the size of teh componet) is another principal concern for users in
the field.
Solution: The Swaelok HFE series manual gas pressure
regulator is designed for 1 1/8 in. top mounted systems for compact,
close spacing of components. It contains a welded diaphram and features
an innovative, pressure-sensing assembly (with perfluoroelastomer
poppet) that interacts with a load spring to provide excellent lock-up
performance. Accuracy and low droop os the result. Outlet
pressure is easily adjusted by turning the handle. An optional
tamper resistant handle allows the user to set and seal outlet
pressure. Two outlet pressure ranges are available-vacuum to 30 psig
(2.0 bar) and vacuum to 60 psig (4.1 bar). The HFE series regulator is
assembled, double-bagged, and vacuum-sealed in an ISO Class 4 clean
room and features a 316L VIM-VAR stainless steel body internally
electropolished and finished to 5uin. (0.13 um) Ra. A tied poppet
provides a positive-shutoff and metal-to-metal seal to atmosphere for
ultrahigh-purity applications.
Applications: Semiconductor ultra-high purity applications for gas systems and process lines.
Platform: The HFE series regulator is designed for a 1 1/8 in. C-ring modular platform; complaint with SEMI Draft Document 37001A.
Availability: June 2004 onwards.
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Product Briefings 
