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Dry pump for low utility cost in volume production environments |
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Oct 08, 2004 at 10:00 PM |
 Product Briefing Outline: BOC Edwards has announced
its new iGX platform, responding to an industry need for a versatile,
low utility cost, high-reliability, highperformance dry-pump for
semiconductor processes.
Problem: Most semiconductor manufacturing and R&D
applications require improved clean vacuum technology compared to the
problems associated with conventional oil- sealed pumps.
Solution: The iGX platform sets new standards in excellence,
offering users a wide range of variants and peak speeds to address
applications from clean through to medium-duty processes. Introduction
follows extensive testing, end user trials and qualification by several
tool manufacturers. Its modular design and compact footprint allow for
extensive configuration to suit customer needs. On processes supported
by the iGX, users will benefit from long overhaul intervals, as well as
improved efficiency for lower cost of ownership. Typically, customers
can expect an annual utilities cost saving of 40%.
Applications: A wide range of variants and peak speeds 100, 300,
600 and 1000 m3h-1 (58.9, 176.7, 353.4 and 589 CFM) to address
applications from clean to medium-duty processes within semiconductor
and compound semiconductor markets for 200mm and 300mm fabs
Platform: Active Utility Control feature can significantly
reduce utility consumption during idle periods. The iGX range also
provides ethernet connectivity and web page publishing of key data, as
well as a comprehensive set of other networking options, so that pump
availability can be assured. The Modular design and ultra-compact
footprint allow for configuration to suit customer requirements.
Mounting options include on-tool, close proximity to the tool or remote
location.
Availability: July 2004 onwards
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Product Briefings 
