Jennifer K. Robinson, FabTime, Inc.

ABSTRACT

FabTime is focused on improving wafer-fab cycle times through consulting, training, and our webbased digital dashboard software. For the past two years, we have conducted an informal survey of the roadblocks to great fab cycle-time performance. To date, the top response has been "equipment downtime". In this article, we discuss several best practices for improving fab cycle time by focusing on tool uptime.