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Home arrow News arrow Wafer Processing arrow Project aims to directly observe 0.5 angstrom features
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Project aims to directly observe 0.5 angstrom features Print E-mail
Feb 04, 2005 at 05:00 PM
FEI Company has been selected by the several laboratories that have combined to form the TEAM project, as the R&D partner for building the highest resolution scanning/transmission electron microscope ((S)TEM) in the world. TEAM is a multi-million dollar microscopy project funded by the U.S. Department of Energy's (DOE) Office of Basic Energy Sciences. The project calls for a new microscope that will enable extraordinary new scientific opportunities for direct observation and analysis of individual nanostructures at an unprecedented resolution of 0.5 Angstrom -- approximately one-third the size of a carbon atom - a key dimension for atomic level research.

In this unique project, five major electron microscopy efforts are joining forces: Argonne National Laboratory, Brookhaven National Laboratory, Lawrence Berkeley National Laboratory, Oak Ridge National Laboratory and Frederick Seitz Materials Research Laboratory.

Each laboratory has a separate role in achieving the ambitious mission to directly observe the atomic-scale order, electronic structure, and dynamics of individual nanostructures, even in 3D. The proposed microscope will also become a self-contained materials science lab for in-situ analysis and characterization by facilitating unique experiments across many scientific disciplines.

"FEI's new dedicated corrector platform is the most viable starting point for the TEAM microscope because it is compatible with the extraordinary stability needed in aberration-corrected instruments," stated Uli Dahmen, Scientific Director of TEAM and Head of NCEM Berkeley.

Aberration corrected electron microscopy technology will be at the heart of the TEAM microscope. The successful development of unique aberration correctors is a key objective. Correctors will be designed and developed in cooperation with CEOS, FEI's partner in advanced corrector technology.

"We are extremely proud of the TEAM project's recognition of our mission to deliver dedicated corrector microscopes working up to 300kV for ultimate resolution in TEM and STEM on a routine basis," said George Scholes,Vice President for FEI's (S)TEM business line.
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