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MIKAEL FORSLAND & SEAN O’REILLY, Camfil AB, Sweden

ABSTRACT

Cleanroom environments have classically been constructed to protect persons or processes against particulate contamination in the air. Today, the amount of airborne gaseous species arriving at a surface is much larger than that of particulate species. This fact is already well known under the name “airborne molecular contamination” (AMC). AMC is far more difficult to control than particles. Nevertheless, there are solutions available that concentrate on either eliminating the source or purifying the contaminated air. Some such solutions are described here.