Home
News
Blogs
Fabtech Jobs
Product Briefings
Going Places
300mm Activity Reports
Core Sections
Wafer Processing
Lithography
Fab management
Materials & Gases
Critical Components
Cleanroom
EHS
 
Find

GlobalSpec - The Engineering Search Engine
 
Home arrow News arrow Lithography arrow DNS installs RF3 track in Nikon lab
DNS installs RF3 track in Nikon lab Print E-mail
Feb 04, 2005 at 04:00 AM
Dainippon Screen (DNS) has installed its latest 300mm coat and develop system, the RF 3 in the Nikon lab. The track system is to be integrated with Nikon's NSR-S307E high-NA ArF Scanner as part of agreement to extend R&D activities for the 65nm node as well as develop improved process capabilities.


Readers' comments


Bookmark with:
DeliciousDiggredditStumbleUpon
Visit Fabtech Jobs websiteSubscribe to Fabtech weekly newsletter
Related articles
Nikon to ship double patterning immersion tools in Q408  (20/02/2008)
Rite Track & Tokyo Electron expand track system refurbishment pact  (16/01/2007)
JSR Micro upgrades materials lab to 300mm  (26/09/2006)
Tool Orders: Rite Track secures new European customer under TEL deal  (28/02/2006)
SPIE Microlithography Conference: Lithographers clean up their act  (23/02/2006)
Related jobs
CAD Support Engineer  (Greenock, Scotland, 16/04/2008)
European Account Manager  (Home Based, 05/02/2008)
Quality Analyst Engineer  (Silicon Valley , 13/09/2007)
Software Engineer  (San Jose, 13/09/2007)
Sales Director - Southern or Northern Europe - Mobile Network Operator  (, 23/08/2007)
Subscribe
300mm