|
Silane flash arrestor for inline applications |
|
|
|
Oct 08, 2004 at 11:00 PM |
 Product Briefing Outline: Silicon Skunkworks Inc. has launched
the RB3S, a silane flash arrestor device that is placed inline on
operating Sih4 gas lines. If a breach occurs in the line, the device
will stop the reaction and protect expensive equipment and it will do
so regardless of whether the breach occurs upstream or downstream of the
device. The RB3S requires no power and acts as a double isolation valve
as well as a gas filter.
Problem: Silane is a Pyrophoric gas that is used extensively in IC
fabrication. If a line is breached it will create a reaction often
referred to as a "flash" because of its rapid burn. After the "flash"
has occurred it leaves a powdery substance that renders supply lines
and much of the equipment worthless due to the difficulty of cleaning
the damaged materials.
Solution: If a breach occurs in the line the device will stop the
reaction and protect expensive equipment and it will do so regardless of whether the breach occurs upstream or downstream of the device. The RB3S
does not need power as it uses the shock wave and pressure differential
created by the line breach to activate the device and stop the silane
reaction. All components down stream are isolated and protected from
the reaction. It uses the filter media to take heat out of the reaction
to slow it enough to ensure complete sealing of the valve.
Applications: All process lines used for silane delivery.
Platform: The RB3S has an open/closed triggered visual indication. It
has dual self-actuating valves with four trigger points, is designed for
tube and VCR end connectors and is an all UHP construction.
Availability: July 2004 onwards
|
Product Briefings 
