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Neural network for fab wide wafer to wafer APC |
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Oct 08, 2004 at 10:00 PM |
 Product Briefing Outline: IBEX Process Technology has
launched the enterprise-wide version of its Dynamic Neural Controller
(DNC-e). The DNC-e is a FAB-wide, wafer-towafer advanced process
control solution that uses a neural network engine to predict wafer
quality and provide corrective action feedback, both in process recipe
parameter optimization and equipment maintenance.
Problem: Unlike other APC or FDC products on the market, the DNC-e
inherently combines information from all areas of the fab and provides
corrective action feedback on all recipes run through the equipment.
Solution: Incorporating many types of input data, the neural network
engine learns from production wafers without expensive
design-of-experiments, providing powerful maintenance and recipe
parameter set-point advisories. DNC-e provides feedback on maintenance
actions required to-keep the tool running at peak efficiency and on
recipe adjustments required to optimize product quality. In production
environments the software is claimed to have virtually eliminated major
scrap/rework events, reduced unnecessary maintenance actions by over
60%, and improved process capability by as much as 80%.
Applications: 200& 300mm production fabs.
Platform: The DNC-e features redundant database and application
programming interface servers for high availability (99.99%) and allows
all the tools in the FAB to be controlled and monitored from a single
software system. The DNC-e provides a modular, easily extensible,
scalable hardware and software architecture, making it easy to
incorporate new tools into the system, and is virtually
maintenance-free.
Availability: July 2004 onwards.
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Product Briefings 
