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Ellipsometric porosimetry meets low-k film characterisation requirements |
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Feb 04, 2005 at 08:00 PM |
 Product Briefing Outline: Sopra has launched the EP5
and EP12 tools which are based on Ellipsometric porosimetry (EP). This
is a unique technology to characterize CVD and spin coated porous ultra
low-k materials. EP measures the change of the optical properties and
thickness of the materials during adsorption and desorbtion of an
organic solvent.
Problem: Lowering the low-k film density by introducing porosity has
become an important part of R&D into future generations of
ultra low-K ILD materials. The need for non-destructive
characterisation of porous low-K dielectric films is required. EP
simpler and faster than Positronium Annihilation Lifetime Spectroscopy
(PALS) and Small Angle Neutron Scattering combined with X-ray
Reflectivity (SANS/XR), which have traditionally been used for
characterisation of porous films.
Solution: Analysis during adsorption and desorbtion of an organic
solvent gives the porosity of the low-k. Pore size distribution of both
microporous and mesoporous, cumulative surface area, pore
interconnectivity, Young modulus, thickness and refractive index data
is given within 2 hours. EP qualifies the sealing layer of both
patterned and blanket wafers. The tool detects the diffusion of the
solvent through the sealing layer. The diffusion of the solvent leads
to a change in refractive index of the layer that the spectroscopic
ellipsometer easily detects. EP gives structural information and
qualifies how the material can be integrated in the dual damascene
process.
Applications: EP allows the measurement of PSD at room temperature in
thin films directly deposited on Si or any smooth solid substrate. A
small surface area (<1 mm 2) is sufficient. It is also suited to
characterize other materials like: membranes, fuel cells, Sensors,
Catalysis surfaces,Nano-structure and nano-composite materials, Hybrid
organic & inorganic interfaces.
Platform: IMEC patented the EP technology and has granted an exclusive
license to SOPRA in 2004. SOPRA holds several patents on EP.
Availability: July 2004 onwards.
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Product Briefings 