Gigaphoton has reached a new milestone with its ArF light source
platform with the installation of its 100th system at a major foundry
based in Taiwan, according to the company. The GT40A model that was
installed will be used in the production of 55nm to 65nm devices.
"The installation our 100th GigaTwin light source is yet another
example of the growing confidence surrounding our ArF platforms'
capabilities and advantages, which contributed largely to our sales in
2007,” noted Gigaphoton President Dr. Yuji Watanabe. “We're excited to
be sharing this milestone installation with one of our most-valued
customers, but more importantly, are extremely pleased to be a part of
enabling this important foundry's leading-edge lithography processes."
Gigaphoton
also said that sales of its ArF laser sources significantly exceeded
that of its KrF sources in 2007, helping it to gain market share of
rival Cymer. The company believed it had achieved a market share of 40
percent in 2007 based on unit sales.