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Home arrow News arrow Wafer Processing arrow Harvard CNS selects suite of Carl Zeiss SMT’s advanced microscopes
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Harvard CNS selects suite of Carl Zeiss SMT’s advanced microscopes Print E-mail
Oct 01, 2007 at 06:09 PM
Harvard Harvard University’s Faculty for Arts and Sciences (FAS) has selected a number of Carl Zeiss SMT’s most advanced microscopes for its Center for Nanoscale Systems (CNS). A total of eight Zeiss systems are used at CNS, which now includes transmission-electron microscopes, focused-ion-beam analytical systems, and one of the world’s first helium ion microscopes.

Dr. Dirk Stenkamp, member of the Carl Zeiss SMT AG executive board, described this collaboration as “the perfect match of research and technology excellence.” He added, “It is a great honour for us, and a tribute to the superior capabilities of our instruments, that Harvard has selected Carl Zeiss SMT as its long-term strategic partner for CNS.”

Eric Martin, the CNS Technical Director, said that “our Center supports the imaging needs of hundreds of users each year and our selection process focused on technical excellence. Also critical for us is to have a partner with deep corporate commitment to the excellence of our facility and the success of our operational goals. We found both the technical and the partnership values in Carl Zeiss SMT.”

The new order includes; two corrected/monochromated ‘LIBRA’ 200 Energy Filtering TEMs, two NVision 40 CrossBeam Focused Ion Beam (FIB) workstations, an ULTRA 55 Gemini Column, Field Emission Scanning Electron Microscope, a ‘SUPRA’ 55VP Gemini Column FE-SEM and an ‘EVO’ 50EP Extended Pressure Analytical SEM.

Image

Caption: Frank Averdung (left), President and General Manager of Carl Zeiss SMT Inc. hands over the first of a total of eight advanced microscope systems to Eric Martin, technical director at Harvard's CNS.


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