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Home arrow News arrow Lithography arrow Tool Order: Gigaphoton’s GT61A ArF laser selected by Korean chip manufacturer
Tool Order: Gigaphoton’s GT61A ArF laser selected by Korean chip manufacturer Print E-mail
Oct 01, 2007 at 12:55 PM

GT61AA major Korean chip manufacturer has selected Gigaphoton’s GT61A argon fluoride (ArF) excimer laser light source that will be used in high-volume production by the end of this year, according to the supplier. The GT61A is designed for immersion lithography tools. 

“Today’s announcement signals chipmakers’ mounting confidence in our excimer light source solutions in meeting the stringent requirements for next-generation immersion lithography applications,” stated Dr. Yuji Watanabe, President, Gigaphoton, Inc.
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