Noel Leeson, global head of Linde’s electronics division, noted that “On-site fluorine is delivered at lower pressure than compressed fluorine and eliminates the need to routinely replace and store cylinders. Eliminating cylinder changeouts also reduces the likelihood of moisture entering the system, which can increase particulate levels and cause corrosion.”
 
The Linde fluorine generators provide UMC Singapore’s manufacturing line with a fully redundant supply of high purity, 100 percent fluorine on demand. The fluorine is delivered to the process tools through the blending module, which creates an 80-20 nitrogen-fluorine blend.

The Linde system supplied to UMC Singapore also includes an on-line Fourier Transform Infrared Spectroscopy analysis module, which provides real-time purity analysis of the flow to process tools, and a sampling point for off-line concentration analysis the company said.