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25th Edition: Considerations regarding the appropriate timing for advanced technology facility |
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Feb 20, 2005 at 12:00 AM |
Hal Amick, Ph.D., P.E., Michael Gendreau, INCE.Bd.Cert, Colin Gordon & Associates, San Bruno, CA, USA
ABSTRACT
The intent of this article is to identify some of the reasons for vibration surveys and discuss the appropriate timing for those surveys. This will necessarily involve some discussion of the IEST/ISO operational states of a fab as well as some aspect of measurement protocols. The issue of facility "maturation" will be touched upon, but a detailed presentation of that phenomenon is beyond our present scope. Measured data from multiple surveys taken over periods of many months (or several years) will be used to illustrate the discussions.
25th Edition: Considerations regarding the approproate timing for advanced technology facility vibration...
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