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Distributed equipment data available on demand |
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Oct 08, 2004 at 12:00 AM |
 Product Briefing Outline: Asyst Technologies, has launched
its "Asyst EIB" (Equipment Information Bridge), software, that provides
real-time access to active streams of distributed equipment
information. Asyst EIB is designed to provide the core functionality
for a new category of just-released and future software products that
address the need for equipment "data on demand". The software is
claimed to be the first fully functional solution complying with the
new Interface A and Equipment Data Acquisition (EDA) industry
standards.
Problem: New SEMI standards are currently defining the equipment model
and information access concept. These standards preserve the legacy
SECS/GEM interface, while simultaneously supporting implementations of
advanced manufacturing application capabilities such as e-Diagnostics,
SPC, APC and Run to Run Control. Data access is becoming critical to
meeting OFE and OEE objectives as wafer size increases and technology
nodes decrease.
Solution: EIB is a multi-protocol, multi-connection, inor off-tool
equipment data server based on the SEMI E120 CEM standard. To its
clients, it offers an object model capable of representing the physical
structure of a tool, as well as its behavioral characteristics. It
supports multiple simultaneous connections, multiple communication
interface types - multiple protocols - and includes a framework for
adding additional standard and non-standard interfaces. This provides
realtime visibility into critical processes and the intelligence
necessary to automate control systems, reduce process variation and
improve quality.
Applications: The EIB technology is designed to be both flexible and
adaptable, and can be applied across multiple industries, including
semiconductor and flat panel display manufacturing. EIB technology has
been implemented per SEMI standard E120 (Common Equipment Model), E125,
E132 & E134, and follows XML guidelines as established by SEMI E121
and E128. Platform: An EIB Model Builder application allows Asyst EIB
customers to easily create, update and extend equipment models,
providing another advantage that leads to decreased time to market,
minimized risk of errors, and reduced internal development costs. To
support several inter- and intra-industry EIB initiatives, Asyst will
also offer an EIB Developer Program and an expanded EIB Beta Site
Program.
Availability: July 2004 onwards.
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Product Briefings 
