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Aviza Technology and Mosel Vitelic form ALD/Flash memory JDP |
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Sep 13, 2007 at 11:24 AM |
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 Aviza Technology has announced that it has entered into a joint development program (JDP) with Mosel Vitelic to jointly develop advanced atomic layer deposition (ALD) materials for next-generation Flash applications. The program will utilize Aviza’s Celsior fxP single-wafer ALD system for the development thin-films at the 58nm node and below.
“MVC is pleased to be working with Aviza on developing production-worthy ALD films for next-generation Flash devices,” said Executive Vice President, Dr. Len Mei at Mosel Vitelic Corporation. “Aviza has demonstrated its production-proven ALD process and technology capabilities, and we look forward to working with Aviza on advanced films development.”
Under the terms of the agreement, Aviza will be providing the necessary ALD hardware and process expertise for advanced materials development, while MVC will provide the device design and process integration.
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