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Particle counter with sixth sense |
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Feb 04, 2005 at 11:15 PM |
 Product Briefing Outline: Lighthouse Worldwide Solutions has
created the what it claims to be the smallest sequencing particle
counting manifold system in the industry. When connected to the
Lighthouse REMOTE 2014P/3014P/5014P particle counter, the MiniManifold
is the best-in-class solution for tool monitoring and qualification,
minienvironment monitoring, and even portable, cart-based monitoring
systems, according to the company.
Problem: A minienvironment typically provides laminar (uni-directional)
airflow through the enclosure. A single particle counter or particle
sampling location cannot adequately monitor the entire minienvironment.
Contamination occurring in one location may not be detected unless it
occurs directly upstream of the particle counter. In order to provide
the coverage needed for particle monitoring of the entire
minienvironment multiple particle counters may be needed. This adds
significant cost to provide particle monitoring.
Solution: The MiniManifold allows a single particle counter to monitor
up to 6 locations in a minienvironment or process tool at 0.1 CFM. The
MiniManifold consists of a manifold sequencing system with a built-in
controller and a mini-blower for purge flow. The controller
communicates with the particle counter and can interface to a computer
system or process tool via RS-485/MODBUS communications protocol.The
blower is external to the sequencing system and can be remotely
installed away from the manifold. Users can define programming
sequences as well as purge, sample and hold times. The system has a
built-in buffer to store data records.
Applications: Tool qualification, minienvironment monitoring, facility
and cleanroom monitoring, monitor SMIF and FIMS enclosures, verify
cleanroom performance and trend analysis.
Platform: The Mini Manifold interfaces with Lighthouse Remote P series
particle counters. The P Series has particle sensitivity from 0.2
microns and flow rates of 0.1 CFM. The P series remote particle counter
can also interface with external temperature, relative humidity,
differential pressure and air velocity sensors.
Availability: November 2004 onwards.
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Cleanroom 
