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New Product: Hach Ultra’s MET ONE 6000 offers continuous particle monitoring
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Product Briefing Outline: Hach Ultra has introduced
the MET ONE 6000 Series Remote Airborne Particle Counters, which offer
accurate and reliable continuous particle monitoring. With a
sensitivity range of 0.2 to 5.0µm at 0.1 cfm flow rate and 0.5 to 10µm
at 1.0 cfm flow rate, the MET ONE 6000 series is designed to meet the
specific needs of cleanroom operations within the semiconductor, hard
disk drive and flat panel display industries.
Problem: Although minienvironments are commonly
employed in fabs, there remains the need for constant particle
monitoring due to continued feature size shrinks. The challenges of new
processes and finer geometries, for example, require sampling rates of
1cfm at the 65nm node. The need for reliability, ease of maintenance
and low CoO while meeting new cleanroom requirements is ever present.
Solution:
The MET ONE 6000 offers diagnostic features that provide reduced
troubleshooting and downtime-related costs. Built with ‘Long Life
Laser’ technology, the Met One 6000 offers improved product quality,
reliability and performance for remote particle counting. With
communication options such as RS485 Serial Modbus, Ethernet, Analog,
Pulse and RS232, the MET ONE 6015 is easy to integrate with any
facility monitoring system and enables future upgrading as the
communication needs of a facility change. These communication choices
and an array of mechanical installation options also reduce downtime
related to instrument removal and re-installation during routine
calibration and preventative maintenance work.
Applications: All cleanroom types.
Platform: Available in a sensitivity range of 0.2 to 10µ m, and flow rates of 2.83 LPM or
28.3
LPM. ‘Long Life Laser’ diode reduces the need for replacement parts and
the overall cost of ownership. Instrument can be diagnosed for flow,
sensor, communication failures, and count alarm or count alert through
built-in or external light stack. These additional diagnostic features
provide faster troubleshooting and reduced downtime.
Availability: April 2008 onwards.
