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Home arrow News arrow Wafer Processing arrow 0.5 angstrom imaging milestone met on TEM
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0.5 angstrom imaging milestone met on TEM Print E-mail
Sep 10, 2007 at 09:29 AM

ImageThe highest-resolution images using a (S)TEM electron microscopy have been recorded at 0.5 angstroms using a new instrument developed jointly by U.S. Department of Energy national laboratories (The TEAM Project - Transmission Electron Aberration-corrected Microscope),  FEI Company and CEOS GmbH.

 

The milestone was achieved using both TEM (transmission electron microscope) and STEM (scanning transmission electron microscope) imaging on a single instrument developed by FEI Company - using ‘Titan’ S/TEM technology - equipped with two CEOS-designed spherical aberration correctors.

"This is a great achievement in electron microscope development," said Ulrich Dahmen, TEAM project Director and Director of Lawrence Berkeley National Laboratory's National Center for Electron Microscopy. "As the first big collaborative project for the microscopy community, TEAM set ambitious goals. To have reached the 0.5 Angstrom goal early in the project is a significant milestone for the collaboration, and a validation of the Department of Energy's investment in the development of world-leading scientific instrumentation. Now we look forward to transferring the remarkable performance of the TEAM microscope into a tool for exploration of atomic structure in the nanoworld."
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