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Securing F2 supply for the semiconductor and TFT-LCD industries
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Takako Kimura, Kayo Momoda & Jun Sonobe, Air Liquide Laboratories,Wadai 28, Tsukuba-Shi, Ibaraki-ken, Japan. Yoshihiro Ueno, Air Liquide Japan, Roppongi 1-chome, Minato Ku, Tokyo 106-6010, Japan. Jean-Marc Girard, Air Liquide Electronics Corporate Division, Paris, France
ABSTRACT
This article deals with how to secure a safe and reliable F2 supply at semiconductor manufacturing sites in accordance with the local regulations and the unique circumstances. In order to overcome the drawbacks and concerns of F2 supply, a solution package based on the risk assessment and a material compatibility study is described. As a result a safe, reliable and high-purity F2 supply is available according to the needs of the end user whether by gas cabinet or by on-site generation system, as has been already demonstrated through a continual commercial operation.
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