"ASML is pleased to take delivery of Cymer's new XLR 500i light source, which promises significant reduction in cost of operation for our customers," said Martin van den Brink, executive vice president of marketing and technology at ASML.

"The XLR leverages the advantages of a new era of improved optical stability sources to achieve a step function reduction in operating cost," said Bob Akins, Cymer's chairman and chief executive officer.  "This cost reduction can be realized immediately by chip makers, while the performance benefits will be realized first beginning at the 45 nm node and growing further as features continue to shrink."