|
Tool Order: SVTC buys ALD system from Aviza for Flash and nano apps |
|
|
|
Jul 25, 2007 at 09:56 PM |
SVTC Technologies has placed an order with Aviza Technology for one its ‘Celsior' single-wafer atomic layer deposition (ALD) systems that will be used for ultra-thin high-k and metal films for Flash, non-volatile memory and high-voltage applications, according to Aviza.
"SVTC's customers are pushing the envelope in process and materials development and the capabilities of the Celsior ALD system will allow them to continue on their development roadmaps well into the future," said Bert Bruggeman, SVTC's VP of Operations and General Manager. "We selected the Celsior because of the flexibility it offers to our customers' development teams." "Aviza is pleased that our production-proven Celsior ALD system was selected by SVTC," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "Placing a tool at SVTC enables Aviza to extend its ALD technology to SVTC's diverse customer base and also allows Aviza to expand the reach of its process and technology capabilities outside of the traditional DRAM market to other key markets such as Flash." The news was announced during SEMICON West last week.
|