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9th Edition: Preventing Fires in Semiconductor Cleanrooms |
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Nov 04, 1998 at 11:22 AM |
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Lawrence Shea, Shea Technology, Reno, NV, USA This article describes some basic considerations about minimizing the potential for fires in cleanrooms. Most of the information presented herein is in the form of direct quotes from the National Fire Protection Association #318 Standard for the Protection of Cleanrooms.
9th Edition: Preventing Fires in Semiconductor Cleanrooms
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