Home
News
Blogs
Fabtech Jobs
Product Briefings
Going Places
300mm Activity Reports
Core Sections
Wafer Processing
Lithography
Fab management
Materials & Gases
Critical Components
Cleanroom
EHS
 
Find

GlobalSpec - The Engineering Search Engine
 
Home arrow Cleanroom arrow Articles arrow Edition 09 arrow 9th Edition: Preventing Fires in Semiconductor Cleanrooms
9th Edition: Preventing Fires in Semiconductor Cleanrooms Print E-mail
Nov 04, 1998 at 11:22 AM

Lawrence Shea, Shea Technology, Reno, NV, USA

This article describes some basic considerations about minimizing the potential for fires in cleanrooms. Most of the information presented herein is in the form of direct quotes from the National Fire Protection Association #318 Standard for the Protection of Cleanrooms.

9th Edition: Preventing Fires in Semiconductor Cleanrooms
Readers' comments



Bookmark with:
DeliciousDiggredditStumbleUpon

Visit Fabtech Jobs websiteSubscribe to Fabtech weekly newsletter

Related articles
31st Edition: Alternative high purity polymer piping materials for semiconductor facilities  (29/09/2006)
31st Edition: Post-etch residue and photoresist removal challenges for the 45nm technology node...  (29/09/2006)
31st Edition: Progress in understanding and reducing immersion related defectivity and resist...  (29/09/2006)
25th Edition: IC market trends in 2005 - Picking the positives  (20/02/2005)
24th Edition: Management cost per function reduction in manufacturing  (11/12/2004)

Related jobs
Business Development Manager Electricity Metering  (, 08/04/2008)
Product Engineer  (Richmond, 15/09/2007)
Wireless Market Development Manager - Sweden - Semiconductors  (, 29/08/2007)
Account/Sales Manager - Belgium - Semiconductors  (, 29/08/2007)
Product Engineer  (Richmond, 15/08/2007)
Blog
300mm