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Home arrow Cleanroom arrow Edition 09 arrow 9th Edition: Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Ener...
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9th Edition: Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Energy... Print E-mail
Nov 04, 1998 at 11:20 AM

Daniel Hall, Progressive Technologies, Inc., Tewksbury, MA, USA

A means to reduce energy consumption while improving both operator safety and product yield is discussed. Furthermore, details of a simple, reliable, fail-safe system for reducing the overall flow of air through the facility are given. 

9th Edition: Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Energy, Saving Money, Improving Yield
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