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Tool Order: Mattson selected for millisecond annealing JDP |
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Jul 23, 2007 at 05:58 PM |
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A leading global semiconductor manufacturer has entered into a Joint Development Program (JDP) with Mattson Technology using the equipment suppliers Millios flash rapid thermal processing (fRTP) system to develop advanced millisecond annealing applications. The announcement was made during SEMICON West last week with the system expected to ship to the IC manufacturer's 300mm fab later this year.
"Millios was designed for next-generation device technologies, and it has already demonstrated the advanced capabilities to address critical sub-45 nanometer applications at semiconductor and nanoelectronics research centers CNT and SEMATECH," said David L. Dutton, Mattson Technology's chief executive officer. "This selection by one of the world's largest semiconductor manufacturers validates the system's ability to enable the advanced technology required to help chipmakers achieve increasingly smaller geometries and fabricate more powerful chips. We look forward to working with this latest Millios customer to develop enabling processes for the next generation of IC manufacturing."
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