Brian Raley & Chris Nauert, Motorola, Austin, Texas, USA

ABSTRACT

Motorola has investigated numerous cost reduction efforts from water conservation at several different sites. This paper will discuss some of the recently implemented and relatively simple water use reduction activities including flow standardization across tools (in CMP, fab support equipment and wet cleans) as well as wait-time flow reduction, RCA clean rinse reduction, and installation of restrictive flow orifices in CMP slurry lines.