"By using ozonated water as the cleaning agent, the LIQUOZON LoopO3 offers an environmentally friendly alternative to existing semiconductor cleaning technologies," said Dr. Christiane Gottschalk, Senior Manager of Sales and Customer Service for ozone products with the MKS Power and Reactive Gas Products Group. "It's cost effective, too. Its point-of-use generation of ultra pure ozonated water and the ease of conversion of ozone back to oxygen greatly reduce costs for buying, storing and disposal of cleaning chemicals."

According to MKS, SEZ chose the LIQUOZON LoopO3 system because of their compact size, modular design and unique ability to deliver precise ultra pure ozonated water for cleaning processes and provide zero UPW consumption during idle and a MTBF of more than 20,000 hours.