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10th Edition: Developments in Ceramics for Semiconductor Processing |
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Feb 04, 2005 at 09:38 AM |
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FRANCES MARKEL, MATTHEW SIMPSON, OH-HUN KWON & MARC ABOUAF
Saint-Gobain Industrial Ceramics, Inc., Northboro, MA, USA ABSTRACT
Recent
advances in ceramic materials and processing technologies have enabled
manufacturers of ceramics to overcome critical problems of
contamination control. These advances also enable efficient thermal and
mechanical designs, as well as appropriate electrical and optical
properties for future semiconductor processing. This article summarizes
the benefits provided by the properties of ceramics and the ease of
fabrication of ceramic components for the next generation of
semiconductor processing.
 Developments in Ceramics for Semiconductor Processing
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Wafer Processing 