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Home arrow News arrow Lithography arrow Tool Order: Akrion books photomask cleaning tool order
Tool Order: Akrion books photomask cleaning tool order Print E-mail
Jun 05, 2007 at 04:19 PM
ImageA U.S. manufacturer has placed a multi-million dollar order with Akrion for its GAMA ClearIQ wet station that will be used in the cleaning requirements necessary for extending the lifetime of the mask sets. ClearIQ employs Akrion's i-Clean vessel to deliver multiple and ultra-dilute chemicals for enhanced defect removal.

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